Enabling optical metrology on small 5×5μm2 in-cell targets to support flexible sampling and higher order overlay and CD control for advanced logic devices nodes
- Resource Type
- Article
- Source
- Proceedings of SPIE; March 2018, Vol. 10585 Issue: 1 p105851I-105851I-11, 10479261p
- Subject
- Language
- ISSN
- 0277786X