Effect of Thermal Annealing on the Photoluminescence of Dense Si Nanodots Embedded in Amorphous Silicon Nitride Films.
- Resource Type
- Article
- Source
- Micromachines; Apr2021, Vol. 12 Issue 4, p354-354, 1p
- Subject
SILICON nitride films SILICON nitride AMORPHOUS silicon PLASMA-enhanced chemical vapor deposition ABSORPTION spectra INFRARED spectra - Language
- ISSN
- 2072666X