Back Cover: Piezoelectric MEMS generator based on the bulk PZT/silicon wafer bonding technique (Phys. Status Solidi A 12/2011).
- Resource Type
- Article
- Source
- Physica Status Solidi. A: Applications & Materials Science; Dec2011, Vol. 208 Issue 12, pn/a-n/a, 1p
- Subject
- Language
- ISSN
- 18626300