Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates.
- Resource Type
- Article
- Source
- Micromachines; May2022, Vol. 13 Issue 5, p783-783, 9p
- Subject
ACOUSTIC surface wave devices MAGNETRON sputtering ALUMINUM nitride LEAD zirconate titanate PIEZOELECTRIC thin films THIN films - Language
- ISSN
- 2072666X