Aberration determination in early 157-nm exposure system.
- Resource Type
- Article
- Authors
- Smith, Bruce W.; Conley, Will; Garza Sr., Cesar M.; Meute, Jeff; Miller, Daniel A.; Rich, Georgia K.; Graffenberg, Victoria L.; Dean, Kim R.; Patel, Shashikant; Ford, Arnie; Foster, James; Moers, Marco H. P.; Cummings, Kevin D.; Webb, James E.; Dewa, Paul G.; Zerrade, Azeddine; MacDonald, Susan S.; Hughes, Greg P.; Dirksen, Peter
- Source
- Proceedings of SPIE; Nov2002, Issue 1, p1635-1643, 9p
- Subject
- Language
- ISSN
- 0277786X