Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics.
- Resource Type
- Article
- Authors
- Ma, Yuan Xiao; Su, Hui; Tang, Wing Man; Lai, Pui To
- Source
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Dec2023, Vol. 41 Issue 6, p1-17, 17p
- Subject
- PHONON scattering
METAL oxide semiconductor field-effect transistors
METAL oxide semiconductor capacitors
DIELECTRICS
TRANSISTORS
PERMITTIVITY
CHARGE carrier mobility
- Language
- ISSN
- 21662746
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