Line-edge roughness in sub-0.18-m resist patterns.
- Resource Type
- Article
- Authors
- Palmateer, Susan C.; Cann, Susan G.; Curtin, Jane E.; Doran, Scott P.; Eriksen, Lynn M.; Forte, Anthony R.; Kunz, Roderick R.; Lyszczarz, Theodore M.; Stern, Margaret B.; Nelson-Thomas, Carla M.
- Source
- Proceedings of SPIE; Nov1998 Part 2, Issue 1, p634-642, 9p
- Subject
- Language
- ISSN
- 0277786X