Atomic Layer Deposition of Chlorine Containing Titanium–Zinc Oxide Nanofilms Using the Supercycle Approach.
- Resource Type
- Article
- Source
- Coatings (2079-6412); May2023, Vol. 13 Issue 5, p960, 16p
- Subject
ATOMIC layer deposition NANOFILMS THIN films TITANIUM oxides X-ray reflectometry - Language
- ISSN
- 20796412