Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation.
- Resource Type
- Article
- Source
- Micromachines; Oct2022, Vol. 13 Issue 10, p1601-N.PAG, 12p
- Subject
RECTANGULAR waveguides SURFACE roughness TERAHERTZ materials WAVEGUIDES SURFACE properties ELECTROPLATING SUBMILLIMETER waves COMPUTER simulation - Language
- ISSN
- 2072666X