High-power high-repetition-rate F2 lasers for 157-nm lithography.
- Resource Type
- Article
- Authors
- Vogler, Klaus; Klaft, Ingo; Voss, Frank; Bragin, Igor; Bergmann, Elko; Nagy, Tamas; Niemoeller, Norbert; Spratte, Stefan; Paetzel, Rainer; Govorkov, Sergei V.; Hua, Gongxue
- Source
- Proceedings of SPIE; Nov2002, Issue 1, p660-670, 11p
- Subject
- Language
- ISSN
- 0277786X