Nanofabrication of charge-based Si:P quantum computer devices using single-ion implantation.
- Resource Type
- Article
- Authors
- Mitic, Mladen; Andresen, Soren E.; Chan, Victor C.; Buehler, Tilo M.; Ferguson, Andrew J.; Gauja, Eric; Hudson, Fay E.; Reilly, David J.; Hamilton, A. R.; Dzurak, Andrew S.; Clark, Robert G.; Yang, Changyi; Hopf, Toby; Pakes, Christopher I.; Jamieson, David N.
- Source
- Proceedings of SPIE; Nov2005, Issue 1, p55-63, 9p
- Subject
- Language
- ISSN
- 0277786X