A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology.
- Resource Type
- Article
- Source
- Micromachines; Mar2024, Vol. 15 Issue 3, p356, 14p
- Subject
ELECTRIC fields ELECTROSTATIC fields VACUUM technology MICROSENSORS ELECTRIC power transmission DETECTORS VACUUM - Language
- ISSN
- 2072666X