A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation.
- Resource Type
- Article
- Source
- Micromachines; Aug2023, Vol. 14 Issue 8, p1489, 14p
- Subject
ELECTROSTATIC induction ELECTROSTATIC fields FINITE element method RESONATORS - Language
- ISSN
- 2072666X