Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures.
- Resource Type
- Article
- Source
- Micromachines; Feb2024, Vol. 15 Issue 2, p195, 11p
- Subject
LITHIUM niobate PIEZOELECTRIC thin films LAMB waves ACOUSTIC resonators RESONATORS SOUND waves WAVE energy - Language
- ISSN
- 2072666X