Mechanism of Grain Densification in Nano- and Poly-Crystalline Cu Films and Its Impact in Advanced Metallization Processes.
- Resource Type
- Article
- Source
- Crystals (2073-4352); Feb2024, Vol. 14 Issue 2, p125, 14p
- Subject
COPPER GRAIN ATOMIC force microscopy SCANNING electron microscopy CANONICAL ensemble X-ray diffraction - Language
- ISSN
- 20734352