Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si.
- Resource Type
- Article
- Source
- Micromachines; Aug2021, Vol. 12 Issue 8, p849, 1p
- Subject
DIFFUSION barriers TITANIUM nitride TEST systems ATOMIC force microscopy SCANNING electron microscopy TIN - Language
- ISSN
- 2072666X