Nanopatterning and Nanomachining with Table-Top Extreme Ultraviolet Lasers.
- Resource Type
- Article
- Authors
- Marconi, Mario; Wachulak, Przemyslaw Wojciech; Capeluto, Maria Gabriela; Vaschenko, Georgyi; Bravo, Herman; Menoni, Carmen S.; Rocca, Jorge; Anderson, Erik H.; Chao, Weilun; Attwood, David; Hemberg, Oscar; Frazer, Bradley; Bloom, Scott
- Source
- MRS Online Proceedings Library; 2006, Vol. 961 Issue 1, p1-6, 6p
- Subject
- Language
- ISSN
- 19464274