Epitaxial Defects in Nanoscale InP Fin Structures Revealed by Wet-Chemical Etching.
- Resource Type
- Article
- Source
- Crystals (2073-4352); Apr2017, Vol. 7 Issue 4, p98, 10p
- Subject
INDIUM phosphide epitaxy CRYSTAL defects WET chemistry - Language
- ISSN
- 20734352