集成电路钴化学机械抛光缺陷控制的研究进展. (Chinese)
- Resource Type
- Article
- Authors
- 纪金伯; 张男男; 檀柏梅; 张师浩; 闫 妹; 李 伟
- Source
- Lubrication Engineering (0254-0150); 2023, Vol. 48 Issue 7, p190-197, 8p
- Subject
- ELECTROLYTIC corrosion
COPPER
QUANTUM chemistry
CORROSION potential
PITTING corrosion
EMIGRATION & immigration
ANTIFOULING paint
- Language
- Chinese
- ISSN
- 02540150
Copyright of Lubrication Engineering (0254-0150) is the property of Editorial Office of LUBRICATION ENGINEERING and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)