激光辅助水射流微铳削单晶β-Ga2O3衬底的 实验研究. (Chinese)
- Resource Type
- Article
- Authors
- 田龙; 黄传真; 刘盾; 姚鹏; 刘含莲; 刘雪飞
- Source
- China Mechanical Engineering; 7/10/2023, Vol. 34 Issue 13, p1559-1567, 9p
- Subject
- WATER jets
LASER machining
WATER damage
HARD materials
SEMICONDUCTOR wafers
BRITTLE materials
- Language
- Chinese
- ISSN
- 1004132X
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