Characterization of He/CH4 dc glow discharge plasmas by optical emission spectroscopy, mass spectrometry, and actinometry.
- Resource Type
- Article
- Authors
- de la Cal, E.; Tafalla, D.; Tabares, F. L.
- Source
- Journal of Applied Physics. 1/15/1993, Vol. 73 Issue 2, p948. 7p. 2 Diagrams, 2 Charts, 5 Graphs.
- Subject
- *DYNAMICS
*MULTIPHOTON processes
*ATOMS
*ELECTRIC discharges
*PLASMA gases
- Language
- ISSN
- 0021-8979
Presents a study which investigated the gas-phase kinetics responsible for the formation of some electronically excited radicals and atoms in glow discharge plasmas of He-methane admixtures under several conditions of gas composition and discharge current at a total initial pressure of 0.01 Torr. Experimental setup; Results of the study; Conclusions.