CeO 2 thin films were deposited on stainless steel (SS) and indium tin oxide (ITO)-coated glass by simultaneous anodic and cathodic electrodeposition, and the influence of negative potential on the formation of ceria films was studied with scanning electron microscopy, X-ray diffraction, Raman spectroscopy, van der Pauw measurements, UV-visible spectroscopy and X-ray photoelectron spectroscopy. The results show that CeO 2 films on the anode are slightly affected by the potential, but the particle size, crystal orientation, strain, film thickness, resistivity and Ce(III) content of the films on the cathode increases with increasing potential on the SS substrate. Contradictory to the results of the SS cathode, redshift (E d changed from 3.95 eV to 3.56 eV and E i changed from 3.42 eV to 3.04 eV) occurring in the absorption spectrum of CeO 2 deposited on the ITO-coated glass cathode indicates that the content of Ce 3+ in the cathodic films is dependent on the adopted substrates and decreases as the applied potential is increased. [ABSTRACT FROM AUTHOR]