Thin films of Ce 1 Gd 2 Fe 5− x Ga x O 12 (Ce,Ga:GIG) were prepared on Gd 3 Ga 5 O 12 (GGG) and Ca 2.90 Li 0.30 Nb 1.93 Ga 2.76 O 12 (CLNGG) substrates by using radio frequency magnetron sputtering technique. The phase, grain orientation, surface morphology, transmittance, magnetism and magnetic circular dichroism (MCD) properties of films were analyzed. And the effects of lattice mismatch and non-magnetic Ga 3+ -doping were discussed. The results show that the films with higher crystallized quality and lower stress can be obtained by growing on CLNGG than on GGG. Moreover, the coercive force, magnetization, magneto-optical effect intensity and orientation of film can be effectively regulated by adjusting Ga 3+ -doped concentration. [ABSTRACT FROM AUTHOR]