Effect of SiO2 buffer layers on the structure of SrTiO3 films grown on silicon by pulsed laser deposition.
- Resource Type
- Article
- Authors
- Tejedor, P.; Fuenzalida, V. M.; Briones, F.
- Source
- Journal of Applied Physics. 9/1/1996, Vol. 80 Issue 5, p2799. 6p.
- Subject
- *SILICON oxide
*THIN films
*PULSED laser deposition
- Language
- ISSN
- 0021-8979
Presents a study that examined the effect of silicon oxide buffer layers on the structure of SrTiO[sub3] films grown on silicon by pulsed laser deposition. Experimental procedure; Results and discussion; Conclusion.