Surface Micromachined Polyimide Scanning Thermocouple Probes.
- Resource Type
- Article
- Authors
- Mo-Huang Li; Wu, Julius J.; Gianchandani, Yogesh B.
- Source
- Journal of Microelectromechanical Systems. Mar2001, Vol. 10 Issue 1, p3. 7p. 3 Black and White Photographs, 7 Diagrams, 1 Chart, 4 Graphs.
- Subject
- *ELECTRONIC probes
*THERMOCOUPLES
*POLYIMIDES
- Language
- ISSN
- 1057-7157
Describes micromachined scanning thermocouple probes using low thermal conductivity and high mechanical flexibility of polyimide as a structural material. Use of a low-temperature six-mask process; Provision of temperature sensing by thin-film; Illustration of the structure of the polyimide-based thermal probe.