Towards Micromechanical Radio: Overtone Excitations of a Microresonator Through the Nonlinearities of the Second and Third Order.
- Resource Type
- Article
- Authors
- Koskenvuori, Mika; Tittonen, Ilkka
- Source
- Journal of Microelectromechanical Systems. Apr2008, Vol. 17 Issue 2, p363-369. 7p. 3 Black and White Photographs, 2 Charts, 10 Graphs.
- Subject
- *RESONATORS
*MICROELECTROMECHANICAL systems
*ELECTRONIC excitation
*AUDIO equipment
*AMPLITUDE modulation detectors
*AUDIO-frequency oscillators
- Language
- ISSN
- 1057-7157
A micromechanical resonator with eigenfrequencies in the megahertz-range is excited by signals having frequencies from tens of megahertz to gigahertz. The high-frequency excitation voltage is downconverted to mechanical force at the lower resonance frequency by the second-order force-voltage nonlinearity. The conversion is either assisted by additional local-oscillator signal or it is intrinsic due to an amplitude-modulated (AM) input signal. A circuit-simulator model is tested against measurements and an excellent agreement and thorough interpretation of the results is found. The third-order intercept point is measured and simulated to study the strength of the capacitive third-order non- linearity. Finally, various nonlinear contributions are compared and further improvements for the device are suggested based on the simulations. [2007-0050] [ABSTRACT FROM AUTHOR]