High-k metal gate characterization using picosecond ultrasonic technology.
- Resource Type
- Article
- Source
Solid State Technology . Mar2011, Vol. 54 Issue 3, p14-17. 4p.- Subject
- *
PICOSECOND pulses
*ULTRASONICS
*METALS
*METROLOGY
*ALUMINUM
*GRINDING & polishing - Language
- ISSN
- 0038-111X