Hydrothermal BaTiO3 films on silicon: Morphological and chemical characterization.
- Resource Type
- Article
- Authors
- Pilleux, M. E.; Fuenzalida, V. M.
- Source
- Journal of Applied Physics. 10/1/1993, Vol. 74 Issue 7, p4664. 9p. 3 Black and White Photographs, 1 Diagram, 3 Charts, 4 Graphs.
- Subject
- *THIN films
*SILICON
*MORPHOLOGY
- Language
- ISSN
- 0021-8979
Reports on the morphological and chemical characterization of hydrothermal BaTiO[sub3] films on silicon. Film growth mechanism; Significance of the BaTiO[sub3] films; Fabrication of BaTiO[sub3] thin films.