Growth mechanism and electrical properties of metallic films deposited on silicone oil surfaces.
- Resource Type
- Article
- Authors
- Hongliang Ge; Chunmu Feng; Ye, Gaoxiang; Ren, Yuhang; Jiao, Zhengkuan
- Source
- Journal of Applied Physics. 12/1/1997, Vol. 82 Issue 11, p5469. 3p. 6 Black and White Photographs, 1 Diagram, 1 Graph.
- Subject
- *MICROSTRUCTURE
*METALLIC films
*MAGNETRONS
*SPUTTERING (Physics)
*ELECTRIC resistance
- Language
- ISSN
- 0021-8979
Studies the microstructure and the growth mechanisms of films deposited on silicone oil surfaces by the rf-magnetron sputtering method. Dependence of the growth rate on the film thickness and the substrate temperature; Direct current resistance of the film; Effects of the liquid substrate.