Effect of pre-annealing process on the surface roughness of ridge waveguides formed with wet etching of –Z-cut LiNbO 3.
- Resource Type
- Article
- Authors
- Salgaeva, U. O.; Mushinsky, S. S.; Volyncev, A. B.; Azanova, I. S.; Shevtsov, D. I.
- Source
- Ferroelectrics. 2016, Vol. 496 Issue 1, p143-148. 6p.
- Subject
- *LITHIUM niobate
*SURFACE roughness
*RIDGE waveguides
*ANNEALING of crystals
*WETTING
- Language
- ISSN
- 0015-0193
It is shown that for decreasing the surface roughness of ridge waveguides formed on the –Z-cut of LiNbO3with wet etching it is useful to carry out the annealing of the sample with formed Cr-mask layer prior to the etching. The reason is in Cr-layer inheritance of the near-surface defects of LiNbO3substrate and disclosure of these defects during the etching process. It was confirmed by methods of scanning electron, optical dark field and bright field microscopies of initial and annealed LiNbO3etched under different conditions. [ABSTRACT FROM AUTHOR]