Membrane compatibility for nanofiltration applications in DUV lithography.
- Resource Type
- Article
- Source
Solid State Technology . Feb2008, Vol. 51 Issue 2, p42-47. 5p.- Subject
- *
POLYAMIDE membranes
*PHOTOCHEMICAL research
*ARTIFICIAL membranes
*SOLUTION (Chemistry)
*ORGANIC solvents
*PHOTOLITHOGRAPHY
*LITHOGRAPHY
*POLYETHYLENE - Language
- ISSN
- 0038-111X