microsystem technologies (10)
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microsystem technologies: micro- and nanosystemsinformation storage and processing systems (5)
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sensors (14248220) (4)
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1996 26th european microwave conference (2)
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2011 41st european microwave conference, microwave conference (eumc), 2011 41st european (1)
2011 symposium on design, test, integration & packaging of mems/moems (dtip) (1)
2011 symposium on design, test, integration & packaging of mems/moems (dtip), design, test, integration and packaging of mems/moems (dtip), 2011 symposium on (1)
2013 symposium on design, test, integration and packaging of mems/moems (dtip), design, test, integration and packaging of mems/moems (dtip), 2013 symposium on (1)
2014 international semiconductor conference (cas) (1)
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2017 symposium on design, test, integration and packaging of mems/moems (dtip), design, test, integration and packaging of mems/moems (dtip), 2017 symposium on (1)
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2022 symposium on design, test, integration and packaging of mems/moems (dtip), design, test, integration and packaging of mems/moems (dtip), 2022 symposium on (1)
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