Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator.
- Resource Type
- Article
- Source
- Micromachines; Jan2023, Vol. 14 Issue 1, p157, 9p
- Subject
ACOUSTIC resonators COLUMNS ALUMINUM ALUMINUM nitride ALUMINUM films CAPACITORS - Language
- ISSN
- 2072666X