In this study, a sandwich-structured electrode composed of indium tin oxide (ITO)/metal silver layer/ITO was prepared by the radio frequency magnetron sputtering method. We used the Taguchi method and spectroscopic ellipsometry (SE) analysis to optimize the geometrical structures of the electrodes and the sputtering power for the silver layer. While the Taguchi method allows us to rapidly optimize the manufacturing parameters, SE analysis enables us to precisely evaluate the thickness of each layer of the electrodes, so that the whole optimization process is more precise and effective. When the silver layers of different samples are sputtered under the same conditions, the difference in their thickness is often > 1 nm. Thus, it is difficult to understand the influences of the manufacturing parameters on the optoelectronic performance of the electrodes. Experimental results show that the thickness of the silver layer was the main factor affecting the transmittance and sheet resistance of the electrodes. However, the decisive factors for the Haacke index in the visible light range were the thickness of the bottom ITO film. Nonetheless, the signal-to-noise (S/N) ratios of some factors are quite close. Thus, further analyses are needed to understand this phenomenon. After optimization, the Haacke index is 2 0. 1 7 × 1 0 − 3 Ω − 1 , which is better than the 19.45 of the best sample, suggesting that this experiment has improved the optoelectronic properties of the electrode. [ABSTRACT FROM AUTHOR]