Research on Processing Technology of Multi-Layer Heterogeneous Material Composite Micron Cantilever Beam Structure.
- Resource Type
- Article
- Source
- Micromachines; Feb2022, Vol. 13 Issue 2, pN.PAG-N.PAG, 1p
- Subject
INHOMOGENEOUS materials COMPOSITE materials CANTILEVERS COMPOSITE construction POROUS silicon - Language
- ISSN
- 2072666X