Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, AVS through the American Institute of Physics, 2022, 40 (1), pp.012202. ⟨10.1116/6.0001352⟩ Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2022, 40 (1), pp.012202. ⟨10.1116/6.0001352⟩