Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2018, 435, pp.251-257. ⟨10.1016/j.nimb.2018.03.036⟩ Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2018, 435, pp.251-257. ⟨10.1016/j.nimb.2018.03.036⟩