Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films
- Resource Type
- Article
- Authors
- Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Meersschaut, Johan; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-François; Bender, Hugo; Struyf, Herbert; Detavernier, Christophe; Baklanov, Mikhail; De Feyter, Steven; Armini, Silvia
- Source
- In Microelectronic Engineering 2 April 2015 137:70-74
- Subject
- Language
- ISSN
- 0167-9317