Design of a novel closed-loop electrostatic voltage sensor based on weakly coupled resonators
- Resource Type
- Conference
- Authors
- Wang, Zilong; Wu, Zhengwei; Liu, Xiangming; Gao, Yahao; Peng, Simin; Ren, Ren; Zheng, Fengjie; Lv, Yao; Liu, Jun; Lei, Hucheng; Zhang, Zhouwei; Zhang, Wei; Li, Jiachen; Peng, Chunrong
- Source
- 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2021 IEEE 16th International Conference on. :1611-1614 Apr, 2021
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Micromechanical devices
Location awareness
Time-frequency analysis
Voltage measurement
Sensitivity
Nanoelectromechanical systems
Conferences
- Language
- ISSN
- 2474-3755
A novel high-performance closed-loop electrostatic voltage sensor based on electrically weakly coupled resonator was designed. The MEMS static voltage sensor is designed based on mode localization effect. A three-degree-of-freedom micromechanical sensor which is weakly coupled by electrostatic voltage was fabricated to achieve high-sensitivity voltage measurement. Currently under the open-loop test, the sensor can achieve voltage measurement with a sensitivity of 0.0967/V and a linearity of 6.11%. The experimental results show that the voltage sensitivity of the sensor based on the amplitude ratio output is 87.9 times higher than the sensitivity based on the frequency output.