AutoMM: automatic generation of dynamic macromodels for MEMS devices
- Resource Type
- Conference
- Authors
- Swart, N.R.; Bart, S.F.; Zaman, M.H.; Mariappan, M.; Gilbert, J.R.; Murphy, D.
- Source
- Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Micro electro mechanical systems Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on. :178-183 1998
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Microelectromechanical devices
Electrostatics
Circuit simulation
Mathematical model
Micromechanical devices
Springs
Accelerometers
Equations
Acceleration
Polynomials
- Language
- ISSN
- 1084-6999
We report on the development of a new CAD tool, AutoMM, which supports the automatic generation of dynamic macromodels for a broad class of MEMS devices. The tool is demonstrated by producing a 2 DOF macromodel of the Analog Devices ADXL76 airbag accelerometer. Considerably improved functionality is obtained over earlier models of the device, including prediction of cross-axis response. Excellent agreement is obtained between simulations and measured data.