SmartSiC™ for Manufacturing of SiC Power Devices
- Resource Type
- Conference
- Source
- 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2022 6th IEEE. :85-87 Mar, 2022
- Subject
Components, Circuits, Devices and Systems Engineered Materials, Dielectrics and Plasmas Photonics and Electrooptics Performance evaluation Silicon carbide Supply chains Crystals Carbon dioxide Conductivity Manufacturing SmartSiC SiC Smart Cut™ - Language