Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing.
- Resource Type
- Article
- Source
- Micromachines; Jan2023, Vol. 14 Issue 1, p40, 17p
- Subject
OPTICAL mirrors PARABOLIC reflectors LASER beams MICROMIRRORS CURVATURE MIRRORS - Language
- ISSN
- 2072666X