Optimization of Processing Parameters and Adhesive Properties of Aluminum Oxide Thin-Film Transition Layer for Aluminum Substrate Thin-Film Sensor.
- Resource Type
- Article
- Source
- Micromachines; Dec2022, Vol. 13 Issue 12, p2115, 14p
- Subject
ALUMINUM oxide films SILICON nitride films ALUMINUM nitride films ALUMINUM oxide PROCESS optimization SURFACE roughness SILICON nitride - Language
- ISSN
- 2072666X