sensors and actuators a: physical (22)
journal of micromechanics and microengineering (12)
journal of micromechanics & microengineering (9)
proceedings of spie (7)
mrs online proceedings library (4)
sensors and actuators a-physical (4)
microsystem technologies: micro- and nanosystemsinformation storage and processing systems (3)
microsystem technologies-micro-and nanosystems-information storage and processing systems (3)
journal of microelectromechanical systems (2)
microsystem technologies (2)
2010 ieee instrumentation & measurement technology conference proceedings, instrumentation and measurement technology conference (i2mtc), 2010 ieee (1)
2013 transducers & eurosensors xxvii: the 17th international conference on solid-state sensors, actuators & microsystems (transducers & eurosensors xxvii) (1)
2013 transducers & eurosensors xxvii: the 17th international conference on solid-state sensors, actuators and microsystems (transducers & eurosensors xxvii), solid-state sensors, actuators and microsystems (transducers & eurosensors xxvii), 2013 transducers & eurosensors xxvii: the 17th international conference on (1)
2017 19th international conference on solid-state sensors, actuators and microsystems (transducers), solid-state sensors, actuators and microsystems (transducers), 2017 19th international conference on (1)
cheminform (1)
ecs transactions (1)
fuel processing technology (1)
ieee sensors journal, sensors journal, ieee, ieee sensors j. (1)
journal of aerosol science (1)
journal of vacuum science & technology: part b-microelectronics & nanometer structures (1)
lab on a chip - miniaturisation for chemistry and biology (1)
sensors & actuators a: physical (1)
sensors update (1)
transducers 2009 - 2009 international solid-state sensors, actuators and microsystems conference, solid-state sensors, actuators and microsystems conference, 2009. transducers 2009. international (1)
vacuum (1)