TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 1:806-809 vol.1 2003