8th World Conference on Photovoltaic Energy Conversion; 191-193
In this work, we demonstrated that the p-type PERC solar cells can also be improved front side performance based on front side SiN/SiON anti-reflection coating (ARC) layer structure. Improved ARC layer was obtained by depositing the SiON layer after the SiN layer. By changing the n value of SiON layer through the process parameters, it can be found that the short wavelength can be improved, and the photocurrent can also be increased by about 56mA. About 0.1% gain in conversion efficiency was obtained compared to the result of reference solar cell. Finally, the potential induced degradation (PID) test of SiON PERC solar cell is also in compliance with IEC TS 62804- 1 specifications.